mems-ana_demo

d33-dominant MEMS piezoelectric hysteresis visualization

This directory contains a frozen demo snapshot that visualizes the quasi-static out-of-plane displacement of a MEMS piezoelectric structure dominated by the piezoelectric coefficient d33, driven by a ferroelectric P–Ez hysteresis loop.

The purpose of this demo is not quantitative device design, but to provide a clear, reproducible reference showing how electrical hysteresis maps into mechanical displacement patterns.


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1. Electrical input: P–Ez hysteresis (V-only)

This figure shows the polarization–electric field (P–Ez) hysteresis loop used as the electrical input to the model.

This hysteresis is imposed as a fixed input condition for all subsequent results.


2. uz–V butterfly curve (d33-dominant, fixed scale)

This plot shows the resulting butterfly-shaped displacement–voltage response derived from the P–Ez hysteresis under a d33-dominant assumption.

The butterfly shape directly reflects the underlying ferroelectric hysteresis.


3. Static uz(x,y) mid-plane maps (absolute displacement)

These snapshots show the spatial distribution of $u_z(x,y)$ at the MEMS mid-plane for selected voltage points along the butterfly curve.

All frames use the same color scale (0–500 nm) to allow direct comparison.


4. Dynamic response: uz(x,y) over voltage cycles

This animation shows the time evolution of $u_z(x,y)$ over multiple voltage cycles following the hysteresis loop.


How to run

python -m pip install -e .
python examples/animate_uz_midplane_typical_d33.py

Scope and limitations


Status


Disclaimer

This demo is intended for conceptual understanding and visualization. Real device design and quantitative evaluation require additional physics, including electrical current, losses, nonlinear mechanics, and realistic boundary conditions.