mems-ana_core
mems-ana_core is a calibrated Reduced Order Model (ROM) for
rectangular MEMS diaphragms with Si + PZT unimorph actuation.
It is designed for pre-FEM analysis and enables consistent evaluation of:
- Natural frequencies
- Frequency response functions (FRF)
- Center displacement
- Electrical terminal behavior (VβI)
within a single, physically consistent framework.
π Links
| Language | GitHub Pages π | GitHub π» |
|---|---|---|
| πΊπΈ English |
Key Features
- π KirchhoffβLove plate theory
- β‘ Piezo eigenstrain β bending moment β curvature β displacement
- π Modal superpositionβbased FRF
- π§ͺ Physics-level contract tests using
pytest - π§ Shape factor K_W treated as a 1-point calibrated parameter
Calibration Policy (Important)
This ROM introduces a shape factor K_W that aggregates:
- Plate geometry
- Boundary conditions
- Mode shape normalization
The policy is:
K_Wis calibrated at one reference point (FEM or measurement)- After calibration,
K_Wacts as a pure linear scaling factor - Electrical quantities are independent of
K_W
This behavior is guaranteed by the following test:
mems_ana/tests/test_kw_scaling.py
Intended Use Cases
- Early-stage MEMS diaphragm design
- Order-of-magnitude and sensitivity analysis before FEM
- Educational and analysis templates
- Control-oriented frequency/Q estimation
Directory Structure (Excerpt)
mems-ana_core/
ββ mems_ana/
β ββ geometry/
β ββ materials/
β ββ physics/
β ββ rom/
β ββ solver/
β ββ tests/
ββ pyproject.toml
ββ README.md
ββ CHANGELOG.md
Status
- β ROM structure finalized
- β K_W calibration completed
- β Tests passing
- β Published on GitHub
This module is frozen as a design-ready ROM.