mems-ana

Lightweight MEMS structural analysis tools (pre-FEM)

mems-ana is a lightweight toolkit for pre-FEM shape sanity checks of MEMS structures,
focused on d33-dominant piezoelectric (PZT) actuation.

This page is a visual entry point.
For design intent and assumptions, see the repository README.

🔗 Links

Language	GitHub Pages 🌐	GitHub 💻
🇺🇸 English

What is shown here

Out-of-plane displacement uz(x, y)
d33-dominant actuation with simplified ferroelectric hysteresis
Voltage-driven analysis only
- Current I is NOT modeled
Absolute displacement visualization
(offset at 0 V is allowed)

This is not FEM.
It is used before FEM to check shape, symmetry, and trend consistency.

Demo animation (recommended)

d33-dominant uz(x, y), 10 voltage cycles

positive-only uz
color / z-range fixed: 0–500 nm
geometric aspect ratio preserved
rising / falling branches included

Static reference plots

Representative static results from the same model assumptions.

Modeling assumptions (explicit)

Constitutive relation (simplified):
- S(E) = d33 * (P/Pm) * Ez + Q * P(Ez)^2
- uz ≈ S(E) * t_pzt
P(E) includes up/down branches (hysteresis)
Absolute displacement is used (no zero-shift correction)
This model prioritizes shape consistency, not material accuracy

Demo snapshot policy

All figures and animations shown here come from:

mems-ana_demo/

This directory is intentionally frozen:

no refactor
no dependency update
used as a reproducible reference snapshot

🔗 GitHub Pages
https://github.com/Samizo-AITL/mems-ana/mems-ana_core/

🔗 GitHub (source)
https://github.com/Samizo-AITL/mems-ana/tree/main/mems-ana_core

🧩 Design Core (ROM)

For design-oriented analysis (not visualization),
this project provides a calibrated Reduced Order Model (ROM).

mems-ana_core

Plate + piezo unimorph ROM
Pre-FEM frequency response and displacement analysis
Shape factor K_W calibrated and contract-tested with pytest